Welcome to the BYU Cleanroom - the Integrated Microfabrication Lab

Semiconductor Properties

All Semiconductor Properties · Coefficients of Thermal Expansion · Color Chart · Crystal Planes · Diffusion Profile Calculator/Graph · Direct Bandgap Energy Calculator · Everything Wafers · Impact Ionization Coefficients and Gain Calculator

Microfabrication Processes

All Microfabrication Processes · Chemical Etching · Chemistry Recipe Calculators · Diffusion Profile Calculator/Graph · Ion Implantation · Lithography Materials (Photoresists, adhesion, developer) · Lithography · N-MOS Transistor Tutorial

Optical References

All Optical References · ABCD Matrix Tutorial · Anti-Reflection Coating Thickness Calculator · ARROW Waveguide Layer Thickness Calculator · Color Chart · Complex Index of Refraction Look-up Utility · Diffraction Grating Calculator · FBG Holography

Cleanroom Equipment

All Equipment · Equipment Map · Aligner (Karl Suss Mask MA150) · CMP System · Critical Point Dryer · Dicing Saw (Disco) · E-Beam Evaporator (Denton) · Ellipsometer

Safety and Protocol

All Safety and Protocol · Acid Safety · Emergency Contact · Fire Safety · First Aid · Glove Chemical Resistance · Gowning · HF Safety (coming soon)

User Resources

Contact Us · Cleanroom Access · Scheduler · Equipment Maintenance · Research Students · SEM images · Projects List · BYU Exclusives

External Links

Equipment Manufactures · Purchasing Wafers · Processing Foundries · Industry Cleanrooms · Ion Implantation Services · MEMs · Nanotechnology · Semiconductor

Our cleanroom is a class 10 cleanroom located on the BYU campus, used for research in solid state, optoelectronics, photonics, nanotechnology, microfabrication, MEMS, micro fluidics, etc. This site is intended to be a resource for on-site BYU users as well as visitors doing research in microfabrication and semiconductor processing. It contains a large amount of reference material relevant to microfabrication and semiconductor processing. This includes general information on microfabrication and semiconductor processing as well as resources and research found exclusively at BYU.

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